JPH0259580B2 - - Google Patents
Info
- Publication number
- JPH0259580B2 JPH0259580B2 JP58202205A JP20220583A JPH0259580B2 JP H0259580 B2 JPH0259580 B2 JP H0259580B2 JP 58202205 A JP58202205 A JP 58202205A JP 20220583 A JP20220583 A JP 20220583A JP H0259580 B2 JPH0259580 B2 JP H0259580B2
- Authority
- JP
- Japan
- Prior art keywords
- mesh electrode
- ion
- sample
- holding device
- sample holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 33
- 239000000284 extract Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58202205A JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58202205A JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6095844A JPS6095844A (ja) | 1985-05-29 |
| JPH0259580B2 true JPH0259580B2 (en]) | 1990-12-12 |
Family
ID=16453700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58202205A Granted JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095844A (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455764U (en]) * | 1990-09-21 | 1992-05-13 | ||
| JPH0650261U (ja) * | 1992-01-23 | 1994-07-08 | 京セラエルコ株式会社 | サーフェスマウント型ポストヘッダコネクタ |
-
1983
- 1983-10-28 JP JP58202205A patent/JPS6095844A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455764U (en]) * | 1990-09-21 | 1992-05-13 | ||
| JPH0650261U (ja) * | 1992-01-23 | 1994-07-08 | 京セラエルコ株式会社 | サーフェスマウント型ポストヘッダコネクタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6095844A (ja) | 1985-05-29 |
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